Market:

The semiconductor industry uses the transmission electron microscope (TEM) for quality control in billions of components across millions of products. However, TEM can only see physical structures – it is blind to the electronic and thermal structures that govern device operation. This $300+ billion industry is working in the dark, and NEI’s technology turns the lights on.

Technology:

NEI’s Scanning TEM Electron Beam-Induced Current (STEM EBIC) imaging system has produced several best-in-the-world results in quantitatively mapping temperature, conductivity, potential, electric field, and work function. Few alternatives can map any of these properties at high resolution, and none can map them all. Standard TEM imaging only identifies where the atoms are in an electronic device – NEI’s technology shows what they are doing.

Advantages:

• No competitive systems commercially available
• Full suite of imaging modes
• Detects otherwise invisible signals
• Images conductivity at atomic-resolution
• Images temperature at atomic-resolution

Development Stage:

• Prototype

Patents Issued:

• Coming Soon

Select Publications:

• Winner of 2019 Microscopy Today Innovation Award for SEEBIC | Microscopy Today
• Electronic activity previously invisible to electron microscopes revealed | PHYS.ORG
• STEM Imaging with Beam-Induced Hole and Secondary Electron Currents | Phys. Rev. Applied
• Electon beam-induced current imaging with two-angstrom resolution | ScienceDirect

Contact:

Email: bhubbard@NanoElectronicImaging.com
Phone: 617-347-6436
Website: www.NanoElectronicImaging.com